Last edited by Maugami
Tuesday, July 14, 2020 | History

1 edition of DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application found in the catalog.

DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application

DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application

  • 324 Want to read
  • 13 Currently reading

Published by Storming Media .
Written in English

    Subjects:
  • TEC008000

  • The Physical Object
    FormatSpiral-bound
    ID Numbers
    Open LibraryOL11849615M
    ISBN 101423552903
    ISBN 109781423552901


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DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application Download PDF EPUB FB2